High Temperature Digital Mass Flow Controller SEC-8000F/D series

Overview

The SEC-8000F/D series, which can operate in high temperature environments, is an ultra clean gas supply system that is used for the analysis of extremely small gas flows at the ppt level, as well as for a variety of tasks including semiconductor and compound semiconductor processing. HORIBA STEC is proud to offer a wide variety of products to suit our customers’ needs.

Features

  • Equipped with digital facility                                                                                     High accuracy:±1.0% S.P.
  • High Speed Responce
  • Ultra Clean
  • RoHS Compliance

Manufactured by HORIBA STEC

Schematics

SEC-8000F/D series