UVISEL

High Precision R&D Spectroscopic Ellipsometer

The UVISEL ellipsometer range offers the best combination of modularity and performance for advanced thin film, surface and interface characterization.
Based on phase modulation technology, the UVISEL ellipsometer provides a powerful optical design to continuously cover the spectral range from 145 to 2100 nm. High quality data are delivered across the whole spectral range in terms of high accuracy, high resolution measurements and excellent signal to noise ratio.

The UVISEL spectroscopic ellipsometer incorporates phase modulation technology to characterize polarization changes at high frequency (50 kHz), and without any mechanical movement. It results in:

• High accuracy measurements for all values of (Ψ,Δ)
• Excellent signal/noise ratio from the VUV  to NIR
• Very fast data acquisition speed at up to 50 ms/point ideal for kinetic studies and in-situ real-time measurements

The UVISEL phase modulated ellipsometer achieves higher sensitivity and accuracy for characterizing thin films when compared to conventional ellipsometers using rotating elements. It enables the detection of very thin films or interfaces that no other ellipsometers can see as well as the characterization of thick layers up to 30µm. The measurement and characterization of transparent samples with backside reflections are simple and accurate and doesn't require the scratch of the backside

UVISEL configurations are flexible, with six spectral ranges available: Visible, FUV, NIR, VUV and two extended ranges from 190 to 2100nm and from 145 to 2100nm. Automation features and accessories allow users to best match the system capabilities to their experiment's demand. The modular design of the UVISEL makes it possible to be used either as a benchtop metrology tool, or for in-situ integration on process chambers or roll to roll machines. A new configuration of the UVISEL features a compact, integrated goniometer to provide a very cost-effective benchtop metrology tool.

The UVISEL is controlled by the DeltaPsi2 software platform that is common to all HORIBA Jobin Yvon thin film metrology tools. DeltaPsi2 provides a complete measurement and modelling package allowing to address both routine and advanced thin film applications. 

For demanding research, industry and QC analysis, in the fields of semiconductor, display, photovoltaic, optical coatings, optoelectronic, biological and chemical applications, the UVISEL provides the best solution for precise characterization of thin film structures.