SC-2 Concentration Monitor, CS-152
The CS-152 standard clean monitor is a high-precision chemical concentration monitor designed for use with the SC-2 solutions used in semiconductor-manufacturing cleaning processes. Featuring fast response and a compact size, the CS-152 continually monitors the concentrations of the various components of the SC-2 solutions (HCl/H2O2/H2O) used to remove metal ions. Feedback control based on the monitor output is used to keep the concentrations of the SC-2 solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals. A short measuring cycle allows the accurate tracking of chemical concentrations, while the compact design facilitates integration with a cleaning device.
- Short 3-second measurement cycle supports concentration control for 300-mm processes
A short measurement cycle of approximately three seconds makes it possible to track concentrations very close to real time. Supports fine-tuned concentration control for batch-type-bath as well as single-bath cleaning devices.
- Compact design helps reduce cleaning-device footprint
The compact design reduces the monitor's footprint by about a third*, reducing the amount of space required by the cleaning device. The monitor is easily integrated with the cleaning device.
*Based on comparison with the HORIBA CS-342 series.
- Reduces lot defects in the cleaning process for improved yield
Output from the monitor is used for automated spiking control of the SC-2 solutions, enabling cleaning with a high reproducibility rate. As a result, lot defects decrease in the cleaning process, which helps to boost the overall yield.
- Fully automatic measurement and simple control
All the user has to do is set up the SC-2 solution supply. Measurement is fully automatic, so no user control is required once the measurement has begun. Air is used for reference spectral measurement, removing the need for a utility water supply.
- Comprehensive measures to eliminate air bubbles enable measurement of high-temperature samples
A built-in bubble removal function removes air bubbles immediately before the flow cell, allowing continuous measurement of the solution as it is flowing. If the monitor has an integrated cooling unit, high-temperature samples can be sent directly to the monitor. Temperature compensation is carried out automatically.
- The monitor uses a low-voltage (24 V DC) with a load of approximatley 45 W gives good energy efficiency. An internal leakage sensor is installed to detect solution leaks, so that the supply of SC-2 solutions can be shut off in the event of an emergency.
Manufactured by HORIBA
No cooling unit
Integrated cooling unit
SC-2 (Hydrochloric acid/Hydrogen peroxide aqueous solution)
Concentration computation principle
Temperature-compensated multivariate analysis
HCl: 0.00 to 2.00 %/0.00 to 10.00 %
HCl: ±0.15 %/±0.20 %
(Peak to peak)
H2O2: ±0.15 %/±0.20 %
20 to 30 °C
20 to 80 °C
20 to 60 ml/min.
20 to 40 ml/min.
0.10 to 0.20 MPa
Approx. 3 seconds minimum
20 to 25 °C
1)Temperature level display:
2)Alarm display (Hydrochloric acid, Hydrogen peroxide):
3)Alarm value settings (Hydrochloric acid, Hydrogen peroxide):
2)Alarm value settings (Hydrochloric acid, Hydrogen peroxide):
12 to 30 V DC (photocoupler insulated)
Maximum current when open collector output is ON: 5 mA
1)Alarm output (Hydrochloric acid, Hydrogen peroxide):
2)Device error (including liquid leakage)
4 to 20 mA (2 outputs: HCl concentration, H2O concentration
24 V DC ±10%, 2 A
205 (W) x 329 (D) x 269 (H) mm
291 (W) x 329 (D) x 269 (H) mm
Approx. 11 kg
Approx. 12 kg
Connection pipe size
For inlet and outlet: Outer diameter 3 mm (inner diameter 2 mm)
Nippon Pillar Super type
Instrumentation air for driving air valve: