High accuracy ±1.0% S.P.

MFC's linearity is compensated by polynomial approximated curve. This achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC standard gas measurement system.

     High Accuracy

      High Accuracy                               High Accuracy

 

           Gas flow rate characteristic curve

Gas flow rate characteristic curve

Gases used in semiconductor processes have a variety of different properties. The flow rate calibration function used in the SEC-Z500X series uses detailed measurement data about the flow rate characteristics of each type of process gas, across different flow rate ranges, as a basis for calibration. This huge store of measurement data paired with highly reliable sensors and the latest in calibration technology ensures extremely precise process gas flow rate control.

     

Traceability

The National Institute of Standards and Technology (NIST, a U.S. organization) certifies the traceability of the flow rate calibration used by the SEC-Z500X series.
These units use a flow rate calibration unit that meets NIST calibration standards.

Traceability

High-precision standard flow rate system

High-precision standard flow rate system

The latest high-precision standard flow rate system is installed at HORIBA STEC’s bases in the United States and Japan. This system, which uses a build-up method, can measure the flow rate of process gases, including those containing a high level of toxic substances, and volatile gases. The measured data is centrally managed through a database maintained at headquarters, which allows HORIBA STEC to continually improve process gas flow rate control precision.