Spectroscopic Ellipsometers

HORIBA Scientific’s ellipsometers incorporate non-rotating phase modulation and liquid crystal modulation technologies to provide the most sensitive and accurate ellipsometric measurement on a large spectral range from VUV to NIR.

In addition to thin film thickness and optical constants characterization, ellipsometric analysis provides rich information on material properties such as anisotropy, gradient, morphology, crystallinity, chemical composition and electrical conductivity.