Wafer Fabrication Process
PHOTOLUMINOR-D

Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.

The application of photoluminescence for the quality...

PHOTOLUMINOR-S

The PHOTOLUMINOR-S has been designed for R&D in many applications and provides high performance and easy operation.   High-sensitivity measurement is important for detecting weak photoluminescence...

MP-VS series

MR-VS series are new special instruments for spectrum measurement which employ compact spectrograph and optical fiber.

Easy measurement of cathodoluminescence spectrograph by mounting to SEM.

MP-32S/M

MP-32S/M requires SEM as excitation source and it can evaluate defects, impurities and crystalline construction in micro region.