Film Thickness Measurement with High Spatial Resolution for Patterned and Multilayer Materials

HORIBA Jobin Yvon has extended the performance capability of the UVISEL spectroscopic phase modulated ellipsometer with the integration of the VIP DUV Spectroscopic reflectometer. The combination of high precision ellipsometer and reflectometer measuring at the same sample position allows characterization of features as small as 10 microns.

Applications of the UVISEL VIP include measurement of film thickness, refractive index and reflectivity of thin films and multilayer stacks with very high accuracy.

By the addition of a large area mapping stages of dimension 200mm, 300mm and above, and with integrated pattern recognition software the UVISEL VIP is able to characterize patterned materials found in semiconductor wafers, display materials, OLED structures and biosensors with thicknesses ranging from a few angstroms to several tens of microns.

The well proven DeltaPsi2 software package controls the complete instrument, and provides a simple interface for production, pilot plant and research applications.

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