Ellipsometers
In-Situ / In-Line Ellipsometers
In situ spectroscopic ellipsometer allows the real-time monitoring and control of thin film deposition and etch processes with sub-monolayer resolution. It provides real-time calculation of film thickness, optical constants, composition of thin film stacks in different ambient.
In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
In Situ Thin Film Process Control - Spectral Range from 190 to 2100 nm