Liquid Auto Refill System

LU-A1000 liquid refill system image.

Overview

HORIBASTEC is the world leader in this area offering a full line up liquid source vaporization control systems utilizing different methodologies including baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to  the point of use. Auto refill systems complete the lineup offering uninterrupted, safe and reliable delivery of the liquid precursor increasing uptime and reducing operator handling and risk of process contamination.

The LU-A1000 series liquid material refill system provides automatic, safe, waste-free material supply to liquid material baking systems (LSC series) and injection systems (MI, MV, VC series). The LU-A1000 series complies with all SEMI S2.S8.S14.CE marking safety standards. In order to prevent operation errors during the dangerous procedure of tank replacement, the LU-A1000 series includes a function for automatically implementing a remaining liquid purge sequence (provided as a standard LU-A1000 series function). Maintenance efficiency and product throughput have also been improved with the LU-A1000 series.

Features

  • Vapour pressure monitoring function (patent pending) that checks the purge efficiency during the mother tank replacement comes as standard.
  • A load cell monitoring the remaining amount of material in the mother tank is available as an option.
  • Compact design, the LU-A1000 series uses an integrated gas system allowing for significant size reduction when compared with conventional fittings, with the added advantage of easy component replacement during routine maintenance.
  • Degasifier module comes as standard reducing the risk bubbles within the liquid, making it ideal to supply a variety of vaporization systems, including injection and baking type applications.
  • Safety standards: SEMI S2/S8/S14, CE mark.
  • Improved safety: A variety of monitoring devices provides total automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function that is activated should a system problem occur.
  • Improved operability: Operating sequences have been automated to prevent operation errors. Operations can also be easily controlled with a touch panel on the front of the unit.
  • Safe, efficient and continuous automatic supply of liquid sources to vaporization systems.



Manufactured by HORIBA STEC

Specifications

Model

LU-A1000 series

Liquids supported

TEOS, TMOB, TMOP, TEOP, BTBAS

Supply method

Pressure movement from He gas

Gas supply pressure

For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N2 0.6 to 0.7 MPa (G)

Tank

Maximum 5-gallon container can be attached (outside of production range)

Operation

Automatic supply/stop using external signal from supply system

Operation area display details

Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc.

Gas connection

Refer to basic flow

Power source

AC 100 to 240 V, 50/60 Hz, 300 VA

Electricity connection

AC 100 to 240 V breaker connection, signal receptacle

External dimensions

See external dimensions diagram

* Please make decisions regarding the specifications above after meeting with STEC.

Schematics

Dimensions
System Examples
Flow Schematic