Liquid source vaporization systems TL series
Overview
As semiconductor devices get faster, the introduction of new materials into the manufacturing processes to achieve increased levels of integration and higher detail in device construction is needed. As a result of this there is now a larger variety and increased volume requirement of liquid sources used in the semiconductor manufacturing process.
HORIBASTEC is the world leader in the area of liquid source delivery offering a full line up liquid source vaporization control systems utilizing different methodologies including baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use. Our Auto-refill systems complete the lineup offering uninterrupted, safe and reliable delivery of the liquid precursor increasing uptime and reducing operator handling and risk of process contamination.
Features
- Feature a specially designed vaporizer that allows the introduction of a carrier gas, thus enabling stable vaporization of large flows at atmospheric pressure.
- Systems consist of a carrier gas mass flow controller, liquid mass flow controller for liquid source control, and vaporizer.
- Vaporization systems are available to suit different vapor generation pressures and flow rates for a variety of liquid sources.
Manufactured by HORIBA STEC