HORIBASTEC has taken its world leading mass flow technology and developed a range of products to control pressure. Precision automatic pressure controllers can control pressure upstream or downstream of the regulator. Chamber pressures can be controlled by an exhaust pressure controller that features a high–resolution stepping motor and unique butterfly valve. For Back-side wafer cooling HORIBASTEC have He pressure controllers with integrated mass flow sensors. HORIBASTEC also offer a range of piezo electric all-metal sealed valves.