Introducing Japan's first X-ray analysis instrument that requires no manuals

April 11, 2000

Horiba, Ltd. (headquarters in Kyoto; Atsushi Horiba, president) is coming out on April 12 with a new energy dispersion X-ray analysis instrument (EMAX ENERGY), which will be used in combination with electron microscope, to analyze elements in micro-area using the X-ray radiation from the sample.

The instrument includes the navigator and help function in Japanese language. It is the Japan*s first X-ray analysis instrument ever to require no "operational manuals," providing easy operation and eliminating the need for operational training. With these advantages, Horiba hopes to expand to the new fields such as quality management in the electronics and semiconductor industries where there are growing needs for inspection with X-ray analysis instrument.

The instrument is a product of merging the basic technology of Oxford Instruments (hereafter referred to as Oxford), the UK manufacturer with which we concluded the comprehensive tie-up in October 1999, and our strong customer support as Japan*s top manufacturer in the field. It is our second joint development following the fluorescent X-ray analyzers from the last year. Through the mutual technological merging/ cooperation of the both firms, each will reinforce product availability, expanding our worldwide market in the X-ray analysis fields.

Main features:
1. Navigator function:
In order to guide you from setting up electron microscope through report creation, the operational buttons are shown in flowchart, facilitating your understanding of the analysis steps at a glance.

2. Bubble help function:
In balloons, the Bubble help function explains the meaning, function, and operational steps of the icons and text boxes on the screen. It also shows the numbers for the operational steps.

3. High performance premium detector capable of detecting as small as Be (beryllium: atomic number 4) (available only with EX-300 and EX-400)

The new X-ray analysis instrument can be used to:

- measure the element composition/distribution in micro-area of the sample with an electron microscope connected

- analyze wafers or foreign bodies on electric parts

- research and develop new materials

- conduct study on mineral composition

- observe the element distribution of living bodies


19 million yen (EX-200) - 26.5 million yen (EX-400)

- Available range for elements measurement
Be (beryllium) - Cf (Californium) (premiere detector, EX-300, EX-400)
B (boron) - Cf (Californium) (standard detector, EX-300, EX-400)

- Resolution
133eV (premiere detector, EX-300, EX-400)
138eV (standard detector, EX-200)

- Size (incl. Standard rack and printer)
800 (W) x 800 (D) x 1500 (H) mm


- About energy dispersion X-ray analysis instrument
Energy dispersion X-ray analysis instrument is used in combination with electron microscope, to perform quantitative and qualitative analysis on elements. Samples irradiated with an electron beam produce X-rays peculiar to the elements (varies with each element). Catching the X-ray with the detector, it provides data regarding the elements types and content ratio. In addition to that, it is able to do color mapping compatible with the microscope image to show the condition of element distribution. While its main target fields vary from mineral research to material research and development, it is also used in the semiconductor fields for quality management to check foreign body and impurities. However, the ease of operation has been in demand among the new markets because condition setting and operational steps require certain skills.

- About the new product
In order to respond to the demand from the new X-ray analysis instrument market, the new product was designed to require no manual. The navigator and bubble help functions are used to show the operational steps to the operators.
In an effort to allow beginners to understand the steps, the navigator function guides you from the beginning of analysis through report creation with the steps displayed in a flowchart. In balloons, the Bubble help function explains the meaning and function of the icons and text boxes on the screen. It also shows the sequential numbers for the operational steps.
Sufficient explanations in Japanese enable users to perform entire operation without consulting the manual. It also gives you a sense of security when an infrequent user uses it.
Of course, it is capable of performing "high accurate and high level" analysis. Your choice also includes a light-element sensitive detector that is capable of detecting as small as beryllium (Be).
In addition, silicon detector with super high purity, which requires no liquid nitrogen to cool the detector part, will be available as an option. It is suitable for the use in clean rooms where liquid nitrogen cannot be used.