VUV Toroidal Mirrors

Specifications and Control

- Ultimate Specification Standard Specification Control
Dimension Up to 500 mm length - -
Radius of Curvature Down to 0.01% 0.5% Calibrated Samples
Slope error Down to 0.5 arcsec rms longitudinal 1 arcsec rms transverse 1 arcsec rms longitudinal 5 arcsec rms transverse Visual interferometric comparison to calibrated sample
Microroughness Down to 2 Å rms 5 Å rms Micromap measurements
Substrate Silicon Zerodur Fused Silica SiC CVD - -
Coating Au Pt AlMgF Ni Cr binding layer Quartz monitoring

Examples of Typical Toroidal Mirrors

Size mm Optical surface mm Radiuses of Curvature Slope Error arcsec rms Max Micro roughness Å rms Coating Substrate
500x60x60 490x50 JY calibrated samples 1 arcsec rms longitudinal 5 arcsec rms transverse 5 Au or Pt Silicon Zerodur Fused Silica
300x50x40 292x42 JY calibrated samples 1 arcsec rms longitudinal 5 arcsec rms transverse 5 Au or Pt Silicon Zerodur Fused Silica
150x30x30 142x22 JY calibrated samples 1 arcsec rms longitudinal 5 arcsec rms transverse 5 Au or Pt Silicon Zerodur Fused Silica
75x15x15 70x10 JY calibrated samples 1 arcsec rms longitudinal 5 arcsec rms transverse 5 Au or Pt Silicon Zerodur Fused Silica