LIQUID AND VAPOR DELIVERY
As semiconductor devices get faster and levels of integration increase, higher precision is required in device construction, and there are now a larger variety of liquid sources used in the semiconductor, FPD and PV manufacturing processes.
HORIBASTEC is the clear world leader in this area offering a full line up liquid flow control and liquid source vaporization and control systems. Different vaporizing methodologies are available for the different precursors , these include baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use. Auto refill systems complete the line-up offering uninterrupted, safe and reliable delivery of liquid precursors increasing uptime and reducing operator handling and risk of process contamination.
Featuring the world's first sensor with a unique cooling method, the LF-F and LV-F series can measure and control chemicals which can not be measured by thermal sensors which heat the liquid.
The MI/MV series can efficiently vaporize liquids using a gas-liquid mixture that allows for complete vaporization, this in a unit not much larger than a mass flow controller.
The compact vaporization system (VC series) does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.
The TL series enables large flow stable vaporization of liquid sources at atmospheric pressure.
Compact baking system suitable for a range of liquid source delivery applications.
The LU series automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.
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