HORIBA has a wide range of mass flow controllers suitable for a variety of solutions and applications. Our extensive range of mass flow meters can be seen below. This table has been provided as a guide for selection purposes and details the product specification of our gas flow meters and controllers. For further information regarding our variety of mass flow controllers and meters please visit the product line page.

HORIBA offer industry leading pressure insensitive mass flow modules, mass flow controllers for use up to 120°C, digital and analog communication, rerangeable and user configurable mass flow controllers and meters plus a wide range of accessories. 

If you would like to discuss product options further, please contact us to speak to an expert.

Download the Mass Flow Controller (MFC) comparison chart here.

Mass Flow Controllers

Model

CRITERION D500

SEC-Z700X

SEC-Z500X Series

Main Product Features

Range topping accuracy and repeatability.  Widest dynamic control range of 0.2% to 100%. Self diagnostics. Programmable, pressure insensitive mass flow module

High accuracy and repeatability.   Programmable, pressure insensitive mass flow module

Widest used programable mass flow controller and meter

Sensor Type

Pressure-based

Thermal

Thermal

Accuracy

+/- 1% S.P. (>5% F.S.)

+/- 1% S.P. (> 25% F.S.)

+/- 1% S.P. (> 25% F.S.)

Power Supply

+/-15 VDC/24 VDC*1

+/- 15VDC

+/- 15VDC/24 VDC*1

Control Interface

Analog (0 - 5 VDC) / Digital (RS-485 F-NET)
DeviceNET™
EtherCAT®

Analog (0 - 5 VDC) / Digital (RS-485 F-NET) DeviceNET™

Analog (0 - 5 VDC) / Digital (RS-485 F-NET)

DeviceNET™
EtherCAT®

Pressure Reading

Yes

Yes

No

Multi Gas/Multi Range

Multi Gas/Multi Range /Multi Pressure

Multi Gas/Multi Range

Multi Gas/Multi Range

Self Diagnostics

Yes

No

No

Fitting

VCR, IGS

VCR, IGS

Swagelok, VCR, IGS

Seal Material

Metal

Metal

Metal or elastomer

Valve Type

Piezo electric - Normally closed

Piezo electric - Normally closed and Normally open

Piezo electric - Normally closed and Normally open

Mounting Orientation

Mount-free

Mount-free

Mount-free

Full Scale Flow Rate

10 SCCM - 50 SLM

10 SCCM - 200 SLM

10 SCCM - 500 SLM

Operating Temperature

15 - 45°C

5 - 50°C

5 - 50°C

 

 

Mass Flow Controllers

Model

SEC-N100 Series

SEC-E Series

SEC-8000 F/D/E Series

Main Product Features

Value line programable mass flow controller and meter

Value line single gas mass flow controller and meter

High Temperature  Mass Flow Controller

Sensor Type

Thermal

Thermal

Thermal

Accuracy

+/- 1% S.P. (> 30% F.S.)

+/- 1% F.S.

+/- 1% S.P. (> 30% F.S.)

Power Supply

+/- 15V/24VDC*2

+/- 15VDC

+/- 15VDC/24 VDC*1

Control Interface

Analog (0 - 5 VDC) / Digital (RS-485 F-NET)
DeviceNET™
PROFIBUS™
CC-Link®
EtherCAT®

Analog (0 - 5 VDC)

Analog (0 - 5 VDC) / Digital (RS-485 F-NET)

DeviceNET™

EtherCAT®

Pressure Reading

No

No

No

Multi Gas/Multi Range

Multi Gas/Multi Range

No

No

Self Diagnostics

No

No

No

Fitting

Swagelok, VCR

Swagelok

Swagelok, VCR

Seal Material

Metal or elastomer

Elastomer

Metal

Valve Type

Solenoid - Normally closed

Solenoid - Normally closed

Piezo electric - Normally closed and Normally open

Mounting Orientation

Mount-free

No

Mount-free

Full Scale Flow Rate

10 SCCM - 1000 SLM

10 SCCM - 200 SLM

5 SCCM - 150 SLM

Operating Temperature

5 - 50°C

5 - 50°C

15 - 120°C

 

*1 24 VDC is available for DeviceNet™ and EtherCAT® models.

*2 24 VDC is available for DeviceNet™, CC-Link®, EtherCAT®and PROFIBUS™ models.

This table is a guideline only. Some models vary. Please see product specification sheet for more details.