TMAH Concentration Monitor HE-960H-TM
Overview
Ideal for management of TMAH concentration in developer solution
The HE-960TM accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions used in semiconductor and liquid crystal manufacturing processes. The FES-510 series of dedicated sensors offers a wide measurement range and outstanding chemical resistance, making it ideal for TMAH measurement.
Features a carbon sensor with outstanding resistance to chemicals
Features
- Wide range compatibility
- Automatic display range switching
- Enables three types of measurement: TMAH concentration, conductivity, and temperature
- Chemical resistant carbon sensor
- 24 V DC power supply
- RoHS compliant
The HE-960H-TM is also an environmentally-friendly product that uses lead-free solder.
Manufactured by HORIBA Advanced Techno
Specifications
Indication Converter
Model | HE-960H-TM |
|---|---|
Ambient environment | Temperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation) |
Power supply | 24 V DC ±10%, 10 W (max.) |
Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
Mass | Approx. 550 g |
Conforming standards | CE marking, FCC Part 15 |
Compatible sensors | FES-510 series (flow-type carbon sensor) |