Pressure Insensitive Mass Flow Module

Overview

CRITERION D200 series
High stability Mass Flow Module- Gas flow control is unaffected by upstream and downstream pressure fluctuations.
Differential Pressure Detection, PI Mass Flow Module

Wide Range Ability ^C^{ontrol wide range flow rate more than 300 times turn down capable}

Gas panel flow diagram

Wide Range Ability

^C^{ontrol wide range flow rate more
than 300 times turn down capable}

Gas panel flow diagram

Features

Latest cutting-edge differential pressure detection available first in the market.
Compact gas line -wide range compact gas panel. (No need for pressure sensor, regulator and filter.)
Control flow rate from low to high. (Wide range)
High accuracy from 3D mapping.
Improve process yield - supply the standard flow rate to semiconductor process.

Manufactured by HORIBA STEC

Specifications

	D212
Maximum Full-Scale (N2)	10 / 20 / 30 / 40sccm		50sccm ~ 10slm
Operating Inlet Pressure	14kPa (g) ~ 350kPa (g)		250kPa(g) ~ 350kPa(g)
Maximum Outlet Pressure	≤13.3kPa (a)	≤53.3kPa (a)	≤13.3kPa(a)	≤53.3kPa(a)
Accuracy under Digital mode (per SEMI Standard E56-1296)	±1% S.P. (35 ~ 100%) ±0.35% F.S. (2.5 ~ 35%)	±1% S.P. ( 50 ~ 100%) ±0.5% F.S. (30 ~ 50%)	±1% S.P. ( 5 ~ 100%) ±0.05% F.S. (0.5 ~ 5%)	±1% S.P. ( 10 ~ 100%) ±0.1% F.S. (2 ~ 10%)
Control Range under Digital mode (% F.S.)	2.5% ~ 100%	30 ~ 100%	0.5 ~ 100%	2 ~ 100%
Recommended Re-Zero Term	once/ year
Valve Type (PIEZO)	Normally Close
Linearity	±0.5% F.S.
Repeatability	±0.3% S.P. ( 10~100%) ±0.03% F.S. ( <10%)
Response Time	800 msec.
Proof Pressure	500kPa(g)
Burst Pressure	1MPa(g)
Leak Integrity	<5×10^-12 Pa·m³/s (He)
Wetted Materials	SUS-316L , INCONEL
Operating Temperature	15 ~ 45°C
Flow Rate Setting Signal	0 ~ 5VDC or RS485 F-NET Protocol
Flow Rate Output Signal	0 ~ 5VDC or RS485 F-NET Protocol
Power Requirement	± 15V ± 5%, 150 mA
Fittings	1.125inch width 1/4VCR , C-seal , W-seal
Installation Orientation	Attitude Insensitive

	D214
Maximum Full-Scale (N2)	10 / 20 / 30 / 40sccm		50sccm ~ 10slm
Operating Inlet Pressure	14kPa (g) ~ 350kPa (g)		250kPa(g) ~ 350kPa(g)
Maximum Outlet Pressure	≤13.3kPa (a)	≤53.3kPa (a)	≤13.3kPa(a)	≤53.3kPa(a)
Accuracy under Digital mode (per SEMI Standard E56-1296)	±1% S.P. (35 ~ 100%) ±0.35% F.S. (2.5 ~ 35%)	±1% S.P. ( 50 ~ 100%) ±0.5% F.S. (30 ~ 50%)	±1% S.P. ( 5 ~ 100%) ±0.05% F.S. (0.5 ~ 5%)	±1% S.P. ( 10 ~ 100%) ±0.1% F.S. (2 ~ 10%)
Control Range under Digital mode	2.5% ~ 100% F.S.	30 ~ 100% F.S.	0.5 ~ 100% F.S.	2 ~ 100% F.S.
Recommended Re-Zero Term	once/ year
Valve Type (PIEZO)	Normally Close
Linearity	±0.5% F.S.
Repeatability	±0.3% S.P. ( 10~100%) ±0.03% F.S. ( <10%)
Response Time	800 msec.
Proof Pressure	500kPa(g)
Burst Pressure	1MPa(g)
Leak Integrity	<5×10 -12 Pa·m 3 /s (He)
Wetted Materials	SUS-316L , INCONEL
Operating Temperature	15 ~ 45°C
Flow Rate Setting Signal	Device Net
Flow Rate Output Signal	Device Net
Power Requirement	11~25VDC 4VA
Fittings	1.125inch width 1/4VCR , C-seal , W-seal
Installation Orientation	Attitude Insensitive
NOTE
There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it.