Thermal Sensor Detection PI Mass Flow Module SEC-Z700X Series
Overview
SEC-Z700 series and CRITERION D200 series give stable flow rate control even with upstream and downstream pressure fluctuations. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid mass flow controller crosstalk phenomenon caused by pressure fluctuations.The new types of mass flow controller, SEC-Z700 series and CRITERION D200 series exhibit high stability and control the gas flow without effect of upstream and downstream pressure fluctuations. They not only give a flow rate output but also the temperature and pressure readings. Control interface is by analog, RS-485 and DeviceNet™ communication. Suitable for the high performance, compact and weight saving of the gas line.
Features
- Multi Gas / Multi Range function The gas type and full scale flow rate can be changed by the customer.
- Variable PID function gives high speed response (within 1 sec) across the whole flow range.
- Compact gas line No need for the regulator, transducer and filter.
- Stable control of the gas flow without effect by upstream and downstream pressure fluctuations.
- Integrated Inlet Pressure Sensor.
- On board Multi display.
- Warranty 1% Set Point high accuracy.
- Ultra clean design - Metal diaphragm, all stainless SUS-316L and polished surface treatment(standard).
- Compact size Same fitting to fitting dimension up to 50 SLM.
- Signal compatibility Analog/RS485 Digital Model , DeviceNet™ Model.
- Network function Controlled by digital signal.
Manufactured by HORIBA STEC