Reticle / Mask Particle Detection System, PR-PD5
Overview
Low-cost inspection with enhanced versatility and compactness
Inheriting the PD series' high efficiency, the PR-PD5 offers outstanding cost performance thanks to its space-saving design. This model can also be integrated with reticle stockers / steppers and cleaning equipment, etc.
Low maintenance and operating costs
Maintenance and operating costs have been reduced by using a highly economical He-Ne laser and simplifed inspection loader/stage unit.
Effective function for countering erroneous detection
The PR-PD5 is equipped with both a polarized differential function for coarse patterns and a low-pass difference function for fine patterns. Utilizing these two methods, erroneous detection can be effectively countered in OPC patterns, etc., that possess both characteristics.
Highly versatile for diverse applications
Detecting particles on patterns with a sensitivity of 0.5 µm, the PR-PD5 not only detects particles on reticles and masks, but also measures them on the glass and pellicle surfaces with high throughput.
Leading-edge, multifunction software
HORIBA’s own multifunction software is used, it features pattern masking, foreign particle marking, and database management functions.
Features
Advanced features for effective particle inspection
- Automatic coordinate compensation function
- Three transmissive photoelectric sensors detect reticle edges.
- Positional deviation of the reticle on the fork is automatically corrected.
- Displayed results are always based on coordinates taken from the reticle edges.
- Reticle inversion mechanism
- 0.5 to 50 µm selectable
- Single detection system
- Built-in and combination types
- Various reports can be output using the data management function.
Manufactured by HORIBA
Specifications
Inspection object | Particles on reticle/mask with or without pellicle |
Principle | Laser scattering method |
Detectable particle size | Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent) |
Inspection result | Data mapping display on the FPD |
| |
Utilities | |
Installation site | Clean room or clean booth, class 100 or better |
Temperature | 23 ±1°C |
Power | 100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase |