Digital Mass Flow Controller SEC-N100 series for Bio process
Overview
Based on years of experience developing market leading products for cutting edge technologies , we offer a range of mass flow controllers that meet our customers needs.
Gases are used for a wide range of applications in a number of industries, ranging from the research and manufacture of solar panels and fuel cells, a subject gaining much attention as renewable energy gains support globally; to the research and manufacture of semiconductors, liquid crystal panels, and light emitting diodes (LEDs) in the electronics industries. The accurate measurement and control of gases in these manufacturing processes dramatically improves the efficiency of the process and in turn saves energy and improves productivity. HORIBA STEC is engaged in the development of mass flow controllers for state-of-the-art manufacturing processes including semiconductor, photovoltaic and led manufacturing and continues to develop products that meet customer needs.
Features
HORIBA STEC offers the lineup meet your purpose.
Models | Select transmission mode | Select power supply |
SEC-N102 series | Digital transmission ▶RS485 F-NET Protocol Analog transmission ▶0～5VDC | ±15VDC(±5%) HORIBA STEC’S lineup includes leased power supply PE series. |
SEC-N104 series | DeviceNet transmission | Conforming to ODVA standards |
SEC-N106 series | PROFIBUS transmission Analog transmission ▶0 to 5VDC, 0 to 10VDC 4 to 20mA | Conforming to PROFIBUS standards 24VDC(13 to 32VDC) |
Models suitable for everything to small flow rate to large flow late.
Flow rate range is controlled from 2% of full-scale flow rate
High accuracy
■High S.P. accuracy
MFC’ s linearity is compensated by polynomial approximated curve. This achieves high accuracy for a l l flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration date of various process gases are measured by HORIBA STEC standard gas measurements system.
High-speed response throughout the flow rate range
■Newly variable PID algorithm: 1 second high-speed response
SEC-N100 series is installed with newly developed “Variable PID system”, which can achieve 1 second response to all setting points. Variable PID is continuously changing depending on setting flow points this allows the PID factor to be optimized when you change full scale flow and gas.
Multi-gas, multi-range solution
■Exclusive software allows the user to alter specification easily
Newly multi-gas, multi-range system has made it possible for the user to change the type of gas or full-scale flow rate freely.
Employing a new design concept focusing on cost performance
HORIBA STEC offer an ultra clean piezo valve Z500 series as an alternative to the N100 series. Please note that changes may be made without notice to the parts and production process where necessary to improve productivity, but not to the extent that would change the product specifications.
Manufactured by HORIBA STEC
Specifications
Schematics
