Flex-CLUE

Overview

Flex-CLUE is the ideal flexible package to handle highperformance CL analysis, for a wide range of applications, within an affordable budget. Based on a dedicated fiber-optic interface, Flex- CLUE offers a compact and remote CL solution perfectly adapted to an SEM environment where space or access is limited.

Features

Maintains original SEM functionality
High-efficiency CL signal-collection
Flexible spectral CL analysis

Manufactured by HORIBA Scientific

Specifications

Optics	High efficiency optics designed to match fiber with spectrometer aperture
Collection interface	200 mm retraction mechanism Manual version Fine adjustment under vacuum Diamond–turned mirror Short working-distance mirror in option
Spectrometer	Focal length from 140 to 320 mm Large choice of diffraction gratings Single or dual-port
Detection	Panchromatic imaging Monochromatic imaging Spectral analysis Hyperspectral spectroscopy analysis Multiple detection options (up to 2) Large choice of detectors Single or multi-channel Thermoelectric or cryogenic cooling UV, visible or near-IR
Spectral coverage	UV-Visible optical fiber 200-1000 nm Visible-near-IR optical fiber 400-1700 nm
CL ouputs	Up to 1
Electron beam control	CLLINK Controller: Multiple acquisition processing (Analog, pulse mode, SE) Mapping, line scan, point measurement Complete synchronization with detection Control by external scan input on SEM
Software	LabSpec Spectroscopy and Imaging suite

Brochures

CLUE Series