Application
HF / HCl Concentration Monitor HF-960H
Overview
Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the management of HF and HCl. Measurement range: 0 -10%.
Features
- Measurement range : 0 - 10 %
- Automatic display range switching
- Enables four types of measurement: HF concentration, HCl concentration, conductivity, and temperature
- 24 V DC power supply
- RoHS compliant
Manufactured by HORIBA Advanced Techno
Specifications
Model | HF-960H |
|---|---|
Measurement range | HF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm |
Power supply | 24 V DC ±10%, 10 W (max.) |
Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
Mass | Approx. 550 g |
Conforming standards | CE marking, FCC Part 15 |
Compatible sensors | FES-510 Series (flow-type carbon sensor) |
Schematics
Downloads
- Technical Article
Abstract
"2-pole electrical conductivity sensors with chemical resistant carbon electrodes are developed in 2002. These sensors are installed in the semiconductor wet process and used as a densitometer practically. The electrical circuit for 4-pole measurement was an innovation which improved the interface problem to the any 4-pole sensors. Single component concentration of HF or TMAH is measured from the conductivity, based on the precise measurement of conductivity and temperature, via individual temperature compensation of conductivity. Etching or developing solution should be controlled severely. Needs for monitoring solution based on the application of conductivity method are increased."
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