Application
Reticle / Mask Particle Detection System, PR-PD2HR
Overview
The HORIBA PR-PD2HR inherits these high-performance functions, while at the same time increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.
Features
- S/N ratio increased by more than 3x. Dramatically improved operating sensitivity.
- Advanced reticle measurement.
- Substantially reduces the initial costs required for inspections.Increases the number of reticles measured, by dramatically reducing inspection times.
Manufactured by HORIBA
Specifications
Principle | Polarized laser scattering method |
Inspection object | Reticle/mask with or without pellicle |
Detector | Photomultiplier |
Light source | Argon laser 488 nm, 10 mW |
Reticle/mask size | 5" x 5", 6" x 6", 2.3 to 6.3 mm thickness (maximum 1/4") |
Pellicle | Thickness: 0.865 to 2.85 µm (±0.2 µm) Frame height: |
Detectable particle size | Pattern surface: 0.35 µm or larger |
Detectability | Standard mode: More than 90% of 0.35 µm particles. |
Particle level setting | Pattern surface: 0.25 to 10 (3 steps) |
Inspection area | Shape: Square, rectangle, circle Area: |
Inspection result | LCD display: |
Particle observation | LCD screen observed from top and bottom side. |
Standard function | Automatic review (skip) function, Coordinate origin setting/rotation compensation function, Inspection center function, Map display insert/delete function, Bar code ready (Hard ware option) |
Optional functions | Pellicle only inspection, Mask blank inspection, Inspection of additional substrate size, 2 way data communication (GEM or SECS2) |
Dimensions | 1710 (W) x 1540 (H) x 1400* (D) mm |
Weight | Approx. 1000kg/2222 lbs |
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UTILITIES | |
Installation site | Clean bench: Class 10 or better |
Power | 200/210/220/240 V AC ±10 V (Customer specified), single phase 4k VA, 50/60 Hz |
Vacuum source | Pressure difference: 8.0 x 104 Pa or more 50 L/min |
Applications
- Measurement of particles on masks and reticle blanks in lithography process.
- In-coming QA inspection and Routine inspection