Semiconductor & FPD
Manufacturing Process Control

Products: UVISEL Plus: 190-920 nm | NIR Option: 2100 nm

Measure thin film thickness and optical constants. The reference ellipsometer for research and process development.

Integrated Spectroscopic Ellipsometer and Spectroscopic Reflectometer

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.

XelPleX is the ideal solution for label-free and multiplexed molecular interaction analysis.

Single point analysis and automated hyperspectral imaging.

Dual vacuum modes.

Spot sizes from 1.2 mm to 10 µm.

The simplicity and power of the XploRA PLUS Raman microscope is unmatched and with a broad range of options, the system provides HORIBA’s best Raman microscope to date for multi-sample and multi-user environments.