Application
Mass Flow Controller SEC-E Series
Overview
Basic model of Mass Flow Controller and Meter having reliable thermal sensor and solenoid valve, achieves precision control of gas flow in a wide range of industrial. Can control wide range from 10 SCCM to 200 SLM.
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Features
Equipped the reliable thermal sesor and solenoid valve
Wide range of flow rate control: from 10 SCCM to 200 SLM (N2)
Suitable for a wide range of applications
- Integration into various manufacturing systems, including those for: LCDs, photovoltaic cells, power semiconductors, coatings
- General industries: control of burner gases, control of atmospheric gases, generation of mixed gases, measurement of ventilation volume
- Research & development: equipment for performance evaluation of various gas sensors, and combustors; biotechnology-related evaluation
Laboratories: gas flow controllers for various experiments, sampling gases, etc
Manufactured by HORIBA STEC
Applications
- LCDs, photovoltaic cells, power semiconductors, coatings, furnace, control of atmospheric gases, generation of mixed gases, measurement of ventilation volume, evaluation of various gas sensors, and combustors; biotechnology-related evaluation
- Laboratories: gas flow controllers for various experiments, sampling gases, etc.
- Control of the flow rates of buner gases, purge gas, etc.
- Flow control equipment where automation is required.