Application
Thin Film Control & Analysis
Featured Products
Visualize your sample and measure thin film thickness and optical constants in seconds.
"With Auto SE, routine work will never be the same!"
NEW NIR Extended Spectral Range !
Endpoint controller for plasma etch cluster tools: Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor
Products: UVISEL Plus: 190-920 nm | NIR Option: 2100 nm
Measure thin film thickness and optical constants. The reference ellipsometer for research and process development.
Visualize your sample and measure thin film thickness and optical constants in seconds.
"With Auto SE, routine work will never be the same!"
NEW NIR Extended Spectral Range !
The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...
The EC-5000 series exhaust pressure controller can maintain a consistent pressure...
Best-selling, compact baking system suitable for a range of liquid source delivery applications. Easy maintenance.
Integrated management with an in-situ real time monitor "DIGI Series" for next-generation thin-film processes
High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNetâ„¢ communications.
High precision liquid mass flow controller using the sensor with a unique cooling method. Can control from micro-liter to ultra low flow rate.
The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.
The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.