HF-SP-CU

2-channel High Precision HF Concentration Monitor HF-SP-CU

2-channel High Precision HF Concentration Monitor

High precision and high performance HF concentration monitor enables micro-process management with +/- 2.0 ppm (highest accuracy), high speed sampling & output, 2-channel sensors, and intra-sensor pressure correction function.
Suitable for the semiconductor finest process control.

 

Segment: Semiconductor
Produktionsfirma: HORIBA Advanced Techno Co., Ltd.

 

  • High precision : +/- 2.0 ppm (highest accuracy)
  • High speed sampling & output
  • 2-channel sensors achieves the measurement of both the supply tank and chamber
  • Intra-sensor pressure correction function

 

 

Informationsanfrage

Sie haben Fragen oder Wünsche? Nutzen Sie dieses Formular, um mit unseren Spezialisten in Kontakt zu treten. * Diese Felder sind Pflichtfelder.

Related products

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HD-960L
HD-960L

Dissolved Oxygen Monitor in Low Concentration

HD-960LR
HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

HE-960R-GC(W)
HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960RW-GC(W)
HE-960RW-GC(W)

2-Channel Resistivity Meter

HF-960EM
HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HT-110
HT-110

Total Organic Carbon Monitor

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

ICP Neo
ICP Neo

ICP Software

OPSA-150
OPSA-150

Organic Pollutant Monitor

SLIA-300
SLIA-300

Highly Sensitive Silica Monitor

SLIA-5000
SLIA-5000

SILICA ANALYZER

TPNA-500
TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

Ultima Expert LT
Ultima Expert LT

Affordable high performance ICP-OES

UP-100
UP-100

Micro Volume pH Monitor

HD-200
HD-200

Field-installation Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

HD-300
HD-300

Field-installation Type Dissolved Oxygen Meter(Two-Wire Transmission, Membrane Type)

HD-480
HD-480

Panel-mount Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

HD-960L
HD-960L

Dissolved Oxygen Monitor in Low Concentration

HD-960LR
HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

HE-200C
HE-200C

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-200H
HE-200H

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For High-concentration)

HE-200R
HE-200R

Field-installation Type Electric Resistivity Meter (Four-Wire Transmission)

HE-300C
HE-300C

Field-installation Type Electric Conductivity Meter (Two-Wire Transmission, For Low-concentration)

HE-300R
HE-300R

Field-installation Type Electric Resistivity Meter (Two-Wire Transmission)

HE-480C
HE-480C

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-480R
HE-480R

Panel-mount Type Resistivity Meter(Four-Wire Transmission)

HE-480R(W)
HE-480R(W)

Industrial resistivity meter

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount Type Conductivity Meter (Four-Wire Transmission, 2-channel)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Wide Range)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

HE-960R-GC(W)
HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960RW
HE-960RW

Panel-mount Type Resistivity Meter(Four-Wire Transmission, 2-channel)

HE-960RW-GC(W)
HE-960RW-GC(W)

2-Channel Resistivity Meter

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HO-200
HO-200

Field-installation Type ORP Meter (Four-Wire Transmission)

HO-300
HO-300

Field-installation Type ORP Meter (Two-Wire Transmission)

HO-480
HO-480

Panel-mount Type ORP Meter (Four-Wire Transmission)

HR-200
HR-200

Feild-installation Type Residual Chlorine Meter (Four-Wire Transmission, Water flow beads)

HR-200RT
HR-200RT

Field-installation Type Residual Chlorine Meter (Four-Wire Transmission, Rotating Type)

HR-480
HR-480

Panel-mount Type Residual Chlorine Meter (Four-Wire Transmission)

HT-110
HT-110

Total Organic Carbon Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor