Applications

Fluid Control

HORIBA solutions are extensively used for the semiconductor market. We achieve a predominant market share of more than 50%*.

Although renowned in the semiconductor market, due to our comprehensive knowledge, we are able to complement a wide variety of industries, applications and markets needing gas or liquid mass flow control, gas or chemical monitoring and analysis of processes. Some of the applications we cover can be seen below, including; electronic manufacturing, bio process, furnace, dry coating, food and beverage, energy i.e. solar batteries or fuel cell, optical fiber, freeze drying, superconductor, test gas generation and environmental.

Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.

*(For mass flow controllers and chemical solution monitors: In-company research.)

Fluid Controllers and Modules

D700MG
mehr D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700WR
mehr D700WR

Wide Range Pressure Insensitive Mass Flow Module

CRITERION D500
mehr CRITERION D500

Pressure Insensitive Mass Flow Module

SEC-Z700S Series
mehr SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Controller

SEC-Z500X Series
mehr SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

FS-3000
mehr FS-3000

Thermal Flow Splitter

GR-300 Series
mehr GR-300 Series

Wafer Back Side Cooling System

MV-2000
mehr MV-2000

Mixed Injection System Liquid Vaporizer

Chamber Health Monitoring

Micropole System QL Series
mehr Micropole System QL Series

Quadrupole Mass Analyzer

VG-200S
mehr VG-200S

Capacitance Manometer

IT-270
mehr IT-270

High-Accuracy Infrared Thermometer [Built-in type]

IT-470F-H
mehr IT-470F-H

High-Accuracy Infrared Thermometer [Built-in type]

IR-300
mehr IR-300

Vapor Concentration Monitor

IR-400
mehr IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

EV 2.0 Series
mehr EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

VCC-100
mehr VCC-100

Vapor Concentration Controller

Endpoint Detection

Micropole System QL Series
mehr Micropole System QL Series

Quadrupole Mass Analyzer

VG-200S
mehr VG-200S

Capacitance Manometer

EV 2.0 Series
mehr EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

IR-400
mehr IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

Mask Inspection

PD Xpadion
mehr PD Xpadion

Reticle / Mask Particle Detection System

RP-1
mehr RP-1

Reticle/Mask Particle Remover

Solution by Quantifying the Chemical Concentration

Chemical Concentration Monitoring

CS-900
mehr CS-900

Non-Contact Chemical Concentration Monitor

CS-620F
mehr CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

IT-270
mehr IT-270

High-Accuracy Infrared Thermometer [Built-in type]

Material & Thin Film Characterization

UVISEL Plus
mehr UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

UVISEL Plus In-Situ
mehr UVISEL Plus In-Situ

In-situ spectroscopic ellipsometer for real-time thin film monitoring

Auto SE
mehr Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

GD-Profiler 2™
mehr GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

XGT-9000
mehr XGT-9000

X-ray Analytical Microscope (Micro-XRF)

SMS
mehr SMS

Add Spectroscopy to ANY Microscope

Cathodoluminescence - CLUE Series
mehr Cathodoluminescence - CLUE Series

Cathodoluminescence Solutions for Electron Microscopy

LabRAM HR Evolution
mehr LabRAM HR Evolution

Confocal Raman Microscope

Chemical Material Planarization

Quantum Dots

Solutions for Plasma Diagnostics

OES-Star
mehr OES-Star

UV-VIS-NIR Spectrometer

iHR Series
mehr iHR Series

Mid-Focal Length Imaging Spectrometers

PoliSpectra® M116 MultiTrack Spectrometer
mehr PoliSpectra® M116 MultiTrack Spectrometer

Multispectra, Multifiber, Multichannel Imaging spectrometer with 8-16-32 Simultaneous UV-NIR Spectra

VU90 Spectrometer
mehr VU90 Spectrometer

Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)

Facilities

6122 series
mehr 6122 series

Gel-filled Self-Cleaning pH Electrode

PG-300 series
mehr PG-300 series

Portable Gas Analyzer

ENDA-5000 series
mehr ENDA-5000 series

Stack Gas Analysis System

GA-370
mehr GA-370

CO, CO2, CH4 Spurengas Analysator

AP-370 Serie
mehr AP-370 Serie

Analysatoren zur Überwachung der Umgebungsluft

HD-960L
mehr HD-960L

Dissolved Oxygen Monitor in Low Concentration

SLIA-300
mehr SLIA-300

Highly Sensitive Silica Monitor

HE-960RW
mehr HE-960RW

Panel-mount Type Resistivity Meter(Four-Wire Transmission, 2-channel)

AH-151
mehr AH-151

Automatic calibration function pH meter

TPNA-500
mehr TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

CODA-500
mehr CODA-500

Automatic COD Monitor

HP-200
mehr HP-200

Field-installation Type pH Meter (Four-Wire Transmission)

Informationsanfrage

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