Fluid Controller and Module

HORIBA has a diverse range of products to cater for your fluid measurement and control requirements.

In a variety of manufacturing processes and research laboratories we offer precise measurement and reliable control of gas and liquids.  HORIBA is the recognised leader of high performance mass flow meters, mass flow controllers, automatic pressure controllers and liquid vaporization systems used throughout the cutting edge semiconductor manufacturing industry.

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

UR-Z700 Series
UR-Z700 Series

Digital Automatic Pressure Regulator

FS-3000
FS-3000

Thermal Flow Splitter

EC-5000 Series
EC-5000 Series

Exhaust Pressure Controller

Informationsanfrage

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