Optical design | Toroïdal VLS Grating (fixed single optic) |
Focal length | 300 mm |
Aperture | f/30 |
Gratings | 2105 gr/mm : 9.5-32 nm 450 gr/mm : 10-110 nm 290 gr/mm : 15.5-170 nm |
Optic coating | Pt or Au |
Deviation angle | 137° |
Dispersion | 2105 gr/mm : 0.5 nm/mm at 9.5 nm 450 gr/mm : 2.3 nm/mm at 10 nm 290 gr/mm : 3.5 nm/mm at 15.5 nm |
Vacuum | 5 10-6 mbar (HV version) 5 10-9 mbar (UHV version) |
Pumping flange | DN63 CF |
Entrance port | Micrometric slits (10 µm to 2 mm) |
Entrance flange | DN40 KF (DN40 CF) |
Exit port | Adjustable CCD port |
Exit flange | DN100 CF |