Pellicle Thickness Analysis
Evaluates the thickness uniformity of the next generation pellicle.
Spectroscopic EllipsometerUVISEL Plus
Particle Object Identification
Useful for investgating problems by analyzing foreign matter components on the reticle.
Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm
AFM-Raman for Physical and Chemical imaging