CS-600F

Fiber Optic Type Chemical Concentration Monitor CS-600F

Fiber Optic Type Chemical Concentration Monitor

An optical fiber-based chemical concentration monitor designed to measure chemicals used in semiconductor manufacturing processes such as cleaning and etching.

Measurements of high-temperature chemicals essential for cutting-edge wet processes can be achieved.  Enabling quick, stable, and space-saving solutions, leading to the optimization and increased precision of chemical management.

Chemical Concentration

DC24VTransmission OutputContact OutputRS-232CHigh TemperatureMulti Component

Segmento: Semiconductor
Fabricante: HORIBA Advanced Techno Co., Ltd.

Stable measurement of high-temperature chemicals

Due to superior optical systems and algorithmic procedures, it has become possible to obtain stable measurements of chemical solutions even under the conditions of high temperature (20−80℃) without the need for adjustments or further processing. Additionally, it does not require the operator to cool the chemicals.

Up to six types of chemicals (chemicals or ranges) are supported

Measurements of up to six types of chemicals (chemicals or ranges) are possible with a single monitor.  Desired types of chemicals or ranges can be freely specified for measurement, allowing for a wide range of measurement needs.

Free layout

With the flexibility to place and accommodate the installation space of chemical supply units or cleaning equipment, the light source unit and the monitor unit can be installed separately.

Reduced equipment downtime

By reducing the frequency of background adjustments in the inline measurements, equipment downtime is significantly reduced, greatly contributing to throughput improvement.

ModelCS-600F
Measurement
principle
Absorption spectroscopic method
Calculation
principle
Temperature compensation type multivariate analysis
Measurement targetNH3/H2O2/H2O (reperesentative specification)
* Please contact HORIBA regarding other chemicals.
Measurement rangeNH3:0.00~1.20mass%、H2O2:0.00~5.50mass%、
H2O:93.3~100.0mass%
RepeatabilityNH3:±0.05mass%、H2O2:±10mass%、H2O:±1.0mass%
Chemical temperature: Within ±1℃/1 hour
Sample solution
temperature
20〜80℃
Measurement cycleApprox. 3 seconds
LCD
display
(1) Measured value (%)
(2) Concentration alarm (HH/H/L/LL)
(3) Error code (EXXX)
(4) Chemical temperature (°C)
(5) Serial/parallel communication status (P/S)
(6) The times of background correction failure (CXXX)
Key input(1) Concentration alarm setting (HH/H/L/LL)
(2) Concentration value shift
(3) Background correction
(4) Hot water correction
(5) Temperature dependent concentration shift
Parallel
input
Input voltage of 12 V to 30 V DC by insulating with photo coupler
(1) Parallel concentration alarm output (On/Off)
(2) Switching chemical solution for measurement
(including background correction)
(3) Hot water correction
Parallel
output
Transistor output (NPN open collector) by insulating with photo coupler
Maximum current when powered ON: 5 mA DC (no internal protective resistance)
Maximum voltage when powered OFF: 30 V DC
(1) Concentration alarm (ON at HH/H/L/LL alarm)
(2) Monitor error (OFF at error)
(3) Measuring (ON at measurement)
(4) Chemical solution type for measurement
(5) Echo to hot water correction input
(6) Warning (ON at occurred)
(7) Background correction status 8) Hot water correction status
Serial inputRS-232C
(1) Request for readout of measurement data
(2) Select chemical solution type to be measured
(3) Hot water correction
Serial
output

RS-232C
(1) Measured data No.
(2) Chemical solution type
(3) Concentration value
(4) Error code
(5) Chemical temperature

Analog
output
4 mA to 20 mA
In case of monitor error occurs, measurement is stopped or
invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution
temperature input
Terminal block inlet (terminal screw M3)
Platinum resistance temperature sensor: Pt100
(Three-conductor type, Class A) *Temperature sensor is not included.
Air
(for operation and purge)
Connection port: 4 mm O.D. quick joint,
Pressure: 0.2 MPa ±0.02 Mpa
Power source100~230V AC(Single-Phase)、50/60Hz
Power consumptionApprox. 85 VA
(transient electric current at the time of the start is excluded)
Weight(Monitor) Approx. 3.6 kg
(Lamp unit) Approx. 2.8 kg
(Sample cell) Approx. 1.2 kg
Ambient temperature(Monitor, Lamp unit) 20°C to 30°C
(Sample cell, Optical fiber) 20°C to 35°C
(Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity(Monitor, Lamp unit, Sample cell) 40% to 70%
(Should be no dew condensation)
Slanting angle at installation(Monitor, Lamp unit) within ±1°
Optical fiberLength: 5 m, minimum bend radius: R 150 mm

Schematics


 

Pedido de Informação

Você tem alguma dúvida ou solicitação? Utilize este formulário para entrar em contato com nossos especialistas.

* Esses campos são obrigatórios.

Related products

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HC-200F
HC-200F

Field-installation Type Fluoride Ion Concentration Meter

HC-200NH
HC-200NH

Field-installation type ammonia nitrogen meter

HC-300F
HC-300F

Field-installation Type Fluoride Ion Concentration Meter

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-200FL
HD-200FL

Field-installation type optical dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-200R
HE-200R

Field-installation type electric resistivity meter (resistivity meter)

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-480R
HE-480R

Panel-mount type resistivity meter (resistivity meter)

HE-480R(W)
HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HU-200SS
HU-200SS

Field-installation type MLSS meter

HU-200TB-H
HU-200TB-H

Field-installation type turbidity meter

HU-200TB-IM
HU-200TB-IM

Field-installation type turbidity/SS meter

HU-200TB-W
HU-200TB-W

Field-installation type turbidity meter

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

OPSA-150
OPSA-150

Organic pollutant monitor

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitor

U-50
U-50

Multi-parameter water quality checker

Water & Liquid Corporate