光伏制造过程的过程控制与现场测量
Liquids supported | POCl3, BBr3. Liquids compatible with pfa and ptfe |
| Process lines | 4 x independent Coaxial, N2 purged process lines to deliver liquid to 4 x furnaces |
| Liquid line connections | All liquid line connections are housed inside cabinets that are connected to facility exhaust |
| Delivery distance limit | Total length of supply/return line 50m |
| Differential pressure sensor with alarm | Check for cabinet or Coaxial tubing leaks |
| Leak detection | Integrated liquid and gas leak detection |
| Over pressure protection | Safety burst disk |
| Supply method | Pressurise bulk canister |
| Bulk canister | Maximum 38 L (see diagram for dimensions) |
| Receiving system | Maximum 20 HORIBA VM Advanced Bubblers |
| Wetted parts | PFA and PTFE |
| Pressure Measurement points | 1. Operation line 1 MPa(G) F.S. 2. Purge line 500 kPa(G) F.S. 3. Bulk canister and pressurised leak check of wetted parts 300 kPa(G) F.S. 4. Vacuum leak test and purge check function 100 kPa(A) F.S. |
| Liquid removal method | Automatic N2 and vacuum cycle purge with automatic purge check function |
| Communications | EtherNET communication between refill system and HORIBA Advanced Bubbler VM |
| Bulk canister scale | 0 to 100 kg (gross) |
| Noise | <60 dB (A) at 1 m |
| Working environment | 15˚C to 35˚C ≤ 85% relative humidity |
| Width | 1200 mm |
| Depth | 605 mm |
| Height (including light tower) | 2635 mm |
| Weight | 375 kg |
| Safety standards | CE, designed to SEMI S2 |
| Power requirements | 100~240 VAC 50/60 Hz 6 A ~ 12 A |
外形尺寸
*subject to change
Automatic Refill System (LU-4000) Features:
- Robust, sealed and exhausted housing
- Cabinet differential pressure with alarm
- Integrated gas leak detection
- Touch panel user interface with remote access for troubleshooting
- Lockable doors and slide out canister retainer with safety interlock
- Canister scale
- Integrated safety reservoir with liquid leak detection
Bubbler (VM) Features:
Liquid temperature is measured in the VM. The flow algorithm calculates the required carrier gas flow through the bubbler based on the measurement of temperature, pressure and vapor pressure.
- Auto refill liquid shut off valve
- Robust N2-rich sealed housing
- Vision Panel
- Lockable door
- Fixed PFA bubbler vessel
- Integrated high performance single board computer
- Integrated safety reservoir with liquid leak detection
