PR-PD3

紧凑型光罩/掩膜颗粒检测系统

PR-PD3 颗粒检测系统提供出色的通量、可靠的光学系统和减少误检测的功能。这些功能被集成在一个紧凑的系统中,旨在尽可能地降低成本。高达 0.5μm 的检测灵敏度使 PR-PD3 功能得以最大化。

事业部: 半导体
产品分类: 计量学
制造商: HORIBA, Ltd.
  • 紧凑设计
  • 低维护和运营成本
  • 减少误检测的有效功能
     

 Attribute

Specification Value

  

Inspection object

Particles on reticle/mask with or without pellicle

Principle

Laser scattering method

Inspection time

Approx. 7 min/2 surfaces (5 inch reticle), Approx. 7 min from inspection start (switch ON) to test result display for two surface (5 inchs) inspection

* High throughput model specific to the glass/pellicle (approx. 4 min. for two surface inspection) is also available.

Detectable particle size

Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)

Reticle size

5, 6 or 7 inch (Please specify when ordering.)

Reticle cassette (Please specify when ordering)

Applicable to the HORIBA standard cassette for 5, 6, 7 inches as well as stepper cases unique to individual maker for 5, 6 inches. (Single size of reticle and cassette handling is the standard. Contact us as to the multiple cassette handling system.)

Inspection result

Data mapping display on the FPD

Dimensions

Approx. 900 (W) x 1350 (D) x 1590 (H) mm
Approx. 35.4 (W) x 53.1 (D) x 62.6 (H) in
(Dimensions will vary depending on the reticle cassette specifications.)

 

Utilities

Installation site

Clean room or clean booth, class 100 or better

Temperature

23 ±1°C

Power

100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase

Vacuum source

Pressure difference 8.0 x 104 Pa or more, 50 L/min

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