HE-960H-TM-S

高精度 TMAH 浓度计

可准确测量 TMAH（四甲基氢氧化铵）的浓度。TMAH 是半导体制程中光刻胶显影液的主要成分。重复性： +/- 0.003% 内。测量范围：0 - 3 %。配备耐化学腐蚀的碳传感器。

制造商: HORIBA Advanced Techno Co., Ltd.

Model name	HE-960H-TM-S
Target of measurement	TMAH
Measurement range	Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm
Repeatability	Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)
Linearity	Within +/- 0.003wt% (Using equivalent input for conductivity)
Transmission output	Number of output: 4
Contact output	Outputs: 5 points
Communication output	RS-485
Power supply	24V DC +/- 10% 10W
Compatible sensor	FES-510 Series
Wetted material of sensor	GC, PFA, Karletz®