CS Series

The concentration monitoring of chemical solutions play an advanced role as a vital part of the "Monitor → Feedback → Control" process control in accordance to the evolution of semiconductor processes. HORIBA has a wide product lineup of chemical concentration monitors specialized for chemical concentration management from FEOL to BEOL in order to fulfil the clients’ needs.


CS-900
CS-900

非接触式化学药液浓度计

CS-620F
CS-620F

光纤型高温磷酸浓度计

CS-700
CS-700

高精度、高稳定性化学药液浓度计

CS-600F
CS-600F

光纤型化学药液浓度计

CS-100 Series
CS-100 Series

独立式化学药液浓度计

CS-100F1 系列
CS-100F1 系列

光纤型化学药液浓度计

Corporate