January 2018

HORIBA will be involved in the Hymet project mainly with two characterization techniques: PP-TOFMS and Tip-Enhanced Raman Spectroscopy (TERS).

Hymet

Hymet project goal is to develop a European hybrid metrology capability for the characterisation of thin film performance and durability in energy applications. This will include the development of new methods to enable datasets from multiple measurements to be combined. These new capabilities will aid deployment in novel energy applications. 

March 2016

Combining plasma profiling TOFMS with TOF-SIMS depth profiling for microelectronic applications

Read our recent article showing the comparison of TOF-SIMS and Plasma Profiling TOFMS (PP-TOFMS) depth profiles of SiGe, metal silicides,  photovoltaics complex metal/oxide stacks, and PZT, published in Journal of Vacuum Science & Technology B.

And discover the unique capabilities of PP-TOFMS as a fast depth profiling tool providing reference free semi-quantification and spontaneous detection of unexpected contaminants.

PP-TOFMS
This article has been written in collaboration with CEA Leti, Grenoble, France.

September 2015

New article from our collaboration with University of Manchester:
I.S. Molchan, G.E. Thompson, J. Walton, P. Skeldon, A. Tempez, S. Legendre, Passivation behaviour of 304 stainless steel in an ionic liquid with a fluorinated anion, Applied Surface Science, in press, published online, doi:10.1016/j.apsusc.2015.08.189

In this work, plasma profiling time-of-flight mass spectrometry is successfully employed for looking at the effect of immersion of type 304 stainless steel in pyrrolidium-2-one trifluoroacetate ionic liquid on surface composition. A reference free semi-quantification results in high resolution elemental depth profiles.

Read more


September 2015

Come and listen to the presentation that will be given at the 20th International Conference on Secondary Ion Mass Spectrometry (SIMS XX) in Seattle (September 13-18, 2015).

Read more


2015年7月

PP-TOFMS将帮助您最优化镀膜工艺和生产的过程,极大地节约您的宝贵时间。观看PP-TOFMS的视频,学习更多超快速、人性化的深度剖析技术。


2015年4月

文献推荐:  Electronic defect study on low temperature processed Cu(In,Ga)Se2 thin-film solar cells and the influence of an Sb layer (与比利时根特大学合作发表)

L Van Puyvelde, J Lauwaert, A Tempez, W Devulder, S Nishiwaki, F Pianezzi, C Detavernier, A N Tiwari and H Vrielinck, J. Phys. D: Appl. Phys. 48, 175104 (2015). doi:10.1088/0022-3727/48/17/175104

内容简介:文中,PP-TOFMS被用于太阳能光伏电池的研究,用于表征玻璃上的CIGS薄膜从而研究元素Sb的扩散。


2015年1月7日(英国、卡迪夫)

英国表面分析论坛会议

会议旨在探索表面分析技术为改善工业/环境、提升能源效率、提高生活质量所做出的贡献。


2014年11月

德国哈梅林太阳能研究所的Nadine Wehmeier女士在第六届国际光电能量转换会议上发表了题为“PECVD掺杂硼作为扩散源以研究其在硅基太阳能电池中的扩散和融合”的演讲。


2014年9月

第一台PP-TOFMS在西班牙奥维耶多大学成功安装。这台PP-TOFMS耦合了辉光放电源与飞行时间质谱仪,拥有纳米级的深度分辨率,可用于基体和薄/厚膜的深度剖析。相对于GD-OESPP-TOFMS的灵敏度更高,还可以用于同位素和分子的深度剖析,非常适用于意想不到元素的分析(如污染物)。同时,PP-TOFMS也是分析稀土元素的理想设备。