DIGICPM

概要

For ease of use and convenient setup to all aspects of process development the PlasmaScope has been designed as a portable instrument, while the DIGICPM is a fixed system including exactly same hardware and software platform. This integrated version offers unique capabilities for significant gain and efficiency of full process control regarding plasma spectra, etching end-point detection status, plasma fault status, etc provided by the DIGICPM. The DIGICPM system combined with its very versatile software framework allows an easy fab and OEM integration.


制造: HORIBA Scientific