真空紫外光谱仪

TGM 7000

  • Deviation angle 172°
  • La = 2927 mm
  • Lb = 7045 mm
  • Grating blank dimensions = 45 x 160 x 30 mm3  
Spectral range Grooves/mm Resolution (Å)
30-100Å (413-124eV) 600 0.05
100-333Å (124-37eV) 180 0.17

TGM 4300

  • Deviation angle 166°
  • La = 2961 mm
  • Lb = 4332 mm
  • Grating blank dimensions = 50 x 210 x 45 mm3  
Spectral range Grooves/mm Resolution (Å)
30-100Å (413-124eV) 600 0.05
100-333Å (124-37eV) 180 0.17

TGM 1400

  • Deviation angle 162°
  • La = 1000 mm
  • Lb = 1415 mm
  • Grating blank dimensions = 30 x 90 x 20 mm3
Spectral range Grooves/mm Resolution (Å)
40-120Å (310-100eV) 1800 0.12
120-360Å (100-35eV) 600 0.36
360-1000Å (35-12eV) 200 1.1

TGM 2600

  • Deviation angle 162°
  • La = 1500 mm
  • Lb = 2634 mm
  • Grating blank dimensions = 35 x 150 x 25 mm3
Spectral range Grooves/mm Resolution (Å)
60-180Å (207-69eV) 1800 0.32
90-270Å (138-46eV) 1200 0.5
180-540Å (69-23eV) 600 0.95
540-1620Å (23-8eV) 200 2.84

TGM 1100

  • Deviation angle 161°
  • La = 880.4 mm
  • Lb = 1127 mm
  • Grating blank dimensions = 30 x 100 x 30 mm3
Spectral range Grooves/mm Resolution (Å)
60-200Å (207-62eV) 1200 0.24
200-800Å (62-16eV) 450 0.80

TGM 3500

  • Deviation angle 160°
  • La = 2166 mm
  • Lb = 3493 mm
  • Grating blank dimensions = 30 x 135 x 30 mm3
Spectral range Grooves/mm Resolution (Å)
50-105Å (248-118eV) 3000 0.08
60-120Å (207-103V) 2250 0.07
100-210Å (124-59eV) 1500 0.16
200-420Å (62-29eV) 750 0.31

TGM 3900

  • Deviation angle 160°
  • La = 2112 mm
  • Lb = 3888 mm
  • Grating blank dimensions = 45 x 135 x 30 mm3  
Spectral range Grooves/mm Resolution (Å)
70-175Å (177-71eV) 2400 0.06
175-500Å (71-25eV) 823 0.17
500-1415Å (25-9eV) 288 0.50

TGM 1700

  • Deviation angle 150°
  • La = 888.5 mm
  • Lb = 1663 mm
  • Grating blank dimensions = 20 x 120 x 25 mm3  
Spectral range Grooves/mm Resolution (Å)
125-300Å (100-41eV) 2400 0.09
166-400Å (75-31eV) 1800 0.12
250-600Å (50-20eV) 1200 0.18
500-1200Å (25-10eV) 600 0.36

TGM 1900

  • Deviation angle 150°
  • La = 1146 mm
  • Lb = 1927 mm
  • Grating blank dimensions = 45 x 90 x 30 mm3  
Spectral range Grooves/mm Resolution (Å)
80-320Å (155-39eV) 1800 0.12
320-1280Å (39-10eV) 450 1.40

TGM 1200

  • Deviation angle 146°
  • La = 1000 mm
  • Lb = 1168 mm
  • Grating blank dimensions = 30 x 110 x 30 mm3  
Spectral range Grooves/mm Resolution (Å)
125-525Å (100-23eV) 950 0.58
500-2000Å (25-6eV) 250 2.19

TGM 300

  • Deviation angle 142°
  • La = 319.9 mm
  • Lb = 319.5 mm
  • Grating blank dimensions = 31 x 31 x 15 mm3
Spectral range Grooves/mm Resolution (Å)
100-500Å (124-25eV) 550 2.8
150-1500Å (82-8eV) 550 5.7
500-3000Å (25-4eV) 275 12.2