PHOTOLUMINOR-D

概要

Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.


The application of photoluminescence for the quality control has been studied for many years, and in 1977 Dr. Michio Tajima of the Electrotechnical Laboratory (currently with the Institute of Space and Astronautical Science: ISAS) developed a method that enables quantitative analysis of impurities in silicon using photoluminescence. The method makes it possible to analyze impurities, such as B, P, Al and As in silicon at accuracies down to part-per trillion(ppta). The quantitative analysis of impurities in silicon using photoluminescence is ASTM and JEIDA registered. 

特征

  • Equal class collecting lens that are employed on PHOTOLUMINOR-S
  • Easy and safety sample setting using TV camera for good repeatability and constant excitation power density.
  • The dedicated software "AMAMI" not only enables quantitative analysis of B, P, Al and As, but it also simultaneously determines resistance and P/N

制造: HORIBA

規格

Model

PHOTOLUMINOR-D

Monochromater

FHR1000

Dispersion
(Based on 1200gr/mm grating)

0.8nm

Spectral range

300nm to 2700nm
(According to grating and
detector used)

Scanning

Linear in wavelength
Linear in wavenumber
Linear in energy

Sample chamber

Macro

Cryostat option

Yes

Beam diameter

100micron (Min)

Sample hold

Vertical

Mapping

Yes (Maximum 3 inch)

Synchronized Focusing System

No

Anti vibration option

No