SEMICON China 2019

HORIBA半导体事业部将参展位于新国博览中心的SEMICON CHINA 2019,历时三天从2019年3月20日至3月22日。
请参考以下运用在半导体工艺制程的量测与分析中的参展产品。我们期待您的光临!

展出产品

Dry Process
Differential Pressure Mass Flow Module CRITERION D507
CRITERION D507
Thermal Mass Flow Module   SEC-Z700S
SEC-Z700S
Back Side Wafer Cooling System GR-307F
GR-307F
Capacitance Manometer   VG-200
VG-200
Gas Monitor IR-400 Series
IR-400 Series
Liquid Auto Refill System LU Series
LU Series
Large Flow Liquid Source Vaporization Control System LE Series
LE Series
WET Process
Chemical Solution Monitor CS-700
CS-700
Micro Volume pH Monitor UP-100
UP-100
High Precision TMAH Concentration Monitor
HE-960H-TM-S
Dissolved Oxygen Monitor in Low Concentration HF HD-960L
HD-960L

 

Rapid Microorganism Detection System ML-100
ML-100
pH Meter with Automatic Calibration function AH-151
AH-151
Industrial Resistivity Meter HE-960RW
HE-960RW
SLIA-300
SLIA-300
  • AFM-拉曼联用分析仪器

  • XploRA Nano
  • 阴极荧光分析半导体化合物

    HORIBA CLUE Series
Plused RF Glow Discharge Optical Emission Spectrometer GD-Profiler2
GD-Profiler2
X-ray Fluorescence Analyzer  MESA-50
MESA-50
Laser Scattering Particle Size Distribution Analyzer  LA-960
LA-960
Lithography
  • 光掩模异物检测系统

    PR-PD3EP  
  • 颗粒物吹扫

    RP-1
  • 空白掩膜检测系统

    PR-PDBLI 

 

 

 

Reticle/Mask Particle Remover    PR-PD3EP
PR-PD3EP

会展地址:

HORIBA 展台:N2展馆 #2501
上海新国际博览中心
上海市浦东新区龙阳路2345号

更多资讯

Offical Website:

http://www.semiconchina.org/en