化学药液浓度计 CS-600F

化学药液浓度计 CS-600F

概要

CS-600F实现了更高标准的功能，旨在更好的适应生产制造，实现半导体湿法工艺对化学药液浓度更精准的管理。比如在多种不同应用中的在线监测高温化学药液，更安全的减少停机时间操作，更轻便的尺寸节约占地面积。

特征

  • 减少尺寸，实现更灵活的布局

CS-600更为轻巧，高度减少36%，体积减少40%，相比较传统型号（CS-100F1系列），槽体占地减少46%。光源器件与主体监测器件可远离槽体安装，更灵活的适应清洗设备的布局。

  • 高稳定性，在线监测高温化学药液（20 ~ 80℃）

全新的光纤系统及提升后的处理算法实现在线监测高精端行业中湿法制程所需的高温化学药液浓度。此浓度可避免冷却药液样本的步骤。HORIBA CS-600F提供了高稳定的监测能力，更有效，更精确的实现了化学药液管理。

  • 显著降低背景校正频率

与传统型号（CS-100F系列）相比较，CS-600F显著降低了背景校正频率，减少停机工作时间，很大程度上提高产出。

  • 一台浓度计可至多测量6种化学药液（药液种类或药液量程）

一台浓度计至多可监测6种化学药液（药液种类或药液量程），药液种类或量程可以任意指定，CS-600F系列可支持绝大多数的监测需求。

  • 至多可输出6种成份的浓度值（串行输出）

相比于传统型号（CS-100F系列）的4种浓度值输出，此款新型号可至多输出6种成分的浓度值。

制造: HORIBA Advanced Techno

規格

Model

CS-600F

Measurement
principle

Absorption spectroscopic method

Calculation
principle

Temperature compensation type multivariate analysis

Measurement target

NH3/H2O2/H2O (reperesentative specification)
* Please contact HORIBA regarding other chemicals.

Measurement range

NH3：0.00～1.20mass%、H2O2：0.00～5.50mass%、
H2O：93.3～100.0mass%

Repeatability

NH3：±0.05mass%、H2O2：±10mass%、H2O：±1.0mass%
Chemical temperature: Within ±1℃/1 hour

Sample solution
temperature

20〜80℃

Measurement cycle

Approx. 3 seconds

LCD
display

(1) Measured value (%)
(2) Concentration alarm (HH/H/L/LL)
(3) Error code (EXXX)
(4) Chemical temperature (°C)
(5) Serial/parallel communication status (P/S)
(6) The times of background correction failure (CXXX)

Key input

(1) Concentration alarm setting (HH/H/L/LL)
(2) Concentration value shift
(3) Background correction
(4) Hot water correction
(5) Temperature dependent concentration shift

Parallel
input

Input voltage of 12 V to 30 V DC by insulating with photo coupler
(1) Parallel concentration alarm output (On/Off)
(2) Switching chemical solution for measurement
(including background correction)
(3) Hot water correction

Parallel
output

Transistor output (NPN open collector) by insulating with photo coupler
Maximum current when powered ON: 5 mA DC (no internal protective resistance)
Maximum voltage when powered OFF: 30 V DC
(1) Concentration alarm (ON at HH/H/L/LL alarm)
(2) Monitor error (OFF at error)
(3) Measuring (ON at measurement)
(4) Chemical solution type for measurement
(5) Echo to hot water correction input
(6) Warning (ON at occurred)
(7) Background correction status 8) Hot water correction status

Serial input

RS-232C
(1) Request for readout of measurement data
(2) Select chemical solution type to be measured
(3) Hot water correction

Serial
output

RS-232C
(1) Measured data No.
(2) Chemical solution type
(3) Concentration value
(4) Error code
(5) Chemical temperature

Analog
output

4 mA to 20 mA
In case of monitor error occurs, measurement is stopped or
invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.

Chemical solution
temperature input

Terminal block inlet (terminal screw M3)
Platinum resistance temperature sensor: Pt100
(Three-conductor type, Class A) *Temperature sensor is not included.

Air
(for operation and purge)

Connection port: 4 mm O.D. quick joint,
Pressure: 0.2 MPa ±0.02 Mpa

Power source

100～230V AC（Single-Phase）、50/60Hz

Power consumption

Approx. 85 VA
(transient electric current at the time of the start is excluded)

Weight

(Monitor) Approx. 3.6 kg
(Lamp unit) Approx. 2.8 kg
(Sample cell) Approx. 1.2 kg

Ambient temperature

(Monitor, Lamp unit) 20°C to 30°C
(Sample cell, Optical fiber) 20°C to 35°C
(Sudden temperature change should be avoided, within ±1°C/1 hour)

Ambient humidity

(Monitor, Lamp unit, Sample cell) 40% to 70%
(Should be no dew condensation)

Slanting angle at installation

(Monitor, Lamp unit) within ±1°

Optical fiber

Length: 5 m, minimum bend radius: R 150 mm



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化学药液浓度计 CS-600F