
TMAH计 HE-960H-TM-S
概要
准确监测TMAH(羟化四甲铵),一种在半导体制程中光刻工艺时使用到的显影液的主要成分。
重复性:± 0.003%
测量范围:0-3%
耐化学药品的碳极传感器
特征
- 高性能,重复性:± 0.003%
- 大范围监测
- 浓度:0-3% ,导电性:0-1000 mS/cm
- 自动显示量程切换
- 实现三种类型的监测:TMAH浓度,导电率,温度
- 耐化学药品的碳极传感器
- 24V DC电源供应
- RoHS认证
制造: HORIBA Advanced Techno
規格
Model name | HE-960H-TM-S |
---|---|
Target of measurement | TMAH |
Measurement range | Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm |
Repeatability | Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity) |
Linearity | Within +/- 0.003wt% (Using equivalent input for conductivity) |
Transmission output | Number of output: 4 |
Contact output | Outputs: 5 points |
Communication output | RS-485 |
Power supply | 24V DC +/- 10% 10W |
Compatible sensor | FES-510 Series |
Wetted material of sensor | GC, PFA, Karletz® |