TMAH计 HE-960H-TM-S

概要

准确监测TMAH(羟化四甲铵),一种在半导体制程中光刻工艺时使用到的显影液的主要成分。
重复性:± 0.003%
测量范围:0-3%
耐化学药品的碳极传感器

特征

  • 高性能,重复性:± 0.003%
  • 大范围监测
  • 浓度:0-3% ,导电性:0-1000 mS/cm
  • 自动显示量程切换
  • 实现三种类型的监测:TMAH浓度,导电率,温度
  • 耐化学药品的碳极传感器
  • 24V DC电源供应
  • RoHS认证

制造: HORIBA Advanced Techno

規格

Model name

HE-960H-TM-S

Target of measurement

TMAH

Measurement range

Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm

Repeatability

Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)

Linearity

Within +/- 0.003wt% (Using equivalent input for conductivity)

Transmission output

Number of output: 4

Contact output

Outputs: 5 points

Communication output

RS-485

Power supply

24V DC +/- 10% 10W

Compatible sensor

FES-510 Series

Wetted material of sensor

GC, PFA, Karletz®

 

产品相关图及其它

TMAH计 HE-960H-TM-S