Crystalline Silicon
Crystalline Silicon production process and HORIBA's products supporting this process.
Related Products
Below you can see the different stages during the Cyrstalline Silicon production process. Please click on each phase in order to see the products that are available to you during this stage.
EMGA-930 is a simultaneous Oxygen/Nitrogen/Hydrogen Analyzer with high accuracy and repeatability suited to advanced R&D as well as quality control. It determines the O/N/H contained in ferrous and non-ferrous metals, ceramics, new materials, electronic materials and other inorganic materials using the inert gas fusion method.
The Ultima Expert is specially designed to handle the most challenging applications and offers the highest performance on the market with unrivaled resolution, high sensitivity and unique stability.
Single point analysis and automated hyperspectral imaging.
Dual vacuum modes.
Spot sizes from 1.2 mm to 10 µm.
High spectral resolution analytical Raman microscope for ultimate performance and flexibility; includes UV Raman configuration, full automation and wide range of accessories.
Single point analysis and automated hyperspectral imaging.
Dual vacuum modes.
Spot sizes from 1.2 mm to 10 µm.
Resistivity meter having the 2-channel carbon sensor. Measurement range: 0 - 100.0 MΩ・cm
Measures the conductivity ranging from purified water up to 2000 µS/cm for pharmaceuticals, food, and cosmetics applications
Measure the ultra-low density of silica at the finest sensitivity of 0.01 µg/L (0.01 ppb).
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The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.
Compact process gas monitor using quadrupole mass spectrometer. Monitors trace gases, responds quickly to process shift . Easy to install and maintain.
HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3. This Auto Refill System achieves higher uptime, cost reduction, improved process stability and higher safety.
Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.
Automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.
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Gas Concentration Monitor
In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.