Mass Flow Controller SEC-E Series

Přehled

Basic model of Mass Flow Controller and Meter having reliable thermal sensor and solenoid valve, achieves precision control of gas flow in a wide range of industrial. Can control wide range from 10 SCCM to 200 SLM.

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Funkce

Equipped the reliable thermal sesor and solenoid valve
Wide range of flow rate control: from 10 SCCM to 200 SLM (N2)
Suitable for a wide range of applications

  • Integration into various manufacturing systems, including those for: LCDs, photovoltaic cells, power semiconductors, coatings
  • General industries: control of burner gases, control of atmospheric gases, generation of mixed gases, measurement of ventilation volume
  • Research & development: equipment for performance evaluation of various gas sensors, and combustors; biotechnology-related evaluation
    Laboratories: gas flow controllers for various experiments, sampling gases, etc

Vyrobeno HORIBA STEC

Žádosti

  • LCDs, photovoltaic cells, power semiconductors, coatings, furnace, control of atmospheric gases, generation of mixed gases, measurement of ventilation volume, evaluation of various gas sensors, and combustors; biotechnology-related evaluation
  • Laboratories: gas flow controllers for various experiments, sampling gases, etc.
  • Control of the flow rates of buner gases, purge gas, etc.
  • Flow control equipment where automation is required.