There are various types of abatement equipment, including combustion, plasma, heater, dry, and catalytic systems. Point-of-use (POU) abatement is connected to multiple chambers for each process (Dry Etching, CVD), and there is a demand for improved abatement efficiency. As a means of measuring the abatement efficiency, the in-line INDIR: IR-400 series and the Q-Mass: RGA described in the EPA430 protocol will help customers improve their measurement and detection capabilities.
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
Quadrupole Mass Analyzer