LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers LF-F/LV-F series
Digital Liquid Mass Flow Meters Controllers LV-F series

Digital Liquid Mass Flow Meters / Controllers

The LF-F and LV-F Series are digital liquid mass flow controllers using a Peltier element which cools the liquid rather than using the more common method of thermal heating. This technique removes the risk of boiling chemicals with a low boiling point, thus allowing for greater chemical control.

 

Segment: Semiconductor
Oddělení: Fluid Control
Výrobní společnost: HORIBA STEC, Co., Ltd.
  • Offer micro-litre to ultra low flow rate control
  • Enable precision flow control of low boiling point and high viscosity liquids
  • Ultra clean.


Measurement Techniques

Cooling Measurement Method
The flow rate sensors in these mass flow controllers for liquids, consists of an electronic cooling element (Peltier element) which is in contact with a capillary tube, as well as several temperature detection elements. When the liquid is flowing, the sensor detects the temperature rise (ΔT) corresponding to the flow rate and displays it as flow rate. Unlike methods where heat is added, this cooling method enables flow rate measurement of liquids with low boiling points. It also prevents problems with interference due to the influence of secondary discharge (vaporization) and makes accurate flow rate measurements possible.

Structure/Operating Principle
Both The LV-F and LF-F series of mass flow meters use the same measurement principle. The LV-F also has a piezo actuator valve and an internal comparison control circuit. These compare the flow rate setting signal and the flow rate output signal and automatically control the valve aperture so that the two signals will match to control the liquid. Since they use a feedback control system, there are no flow rate variations as a result of external factors, and, therefore, stable and accurate control is possible. 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Sterilization Process in Food and Beverage Manufacturing
Sterilization Process in Food and Beverage Manufacturing
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment

Požadavek na informaci

Máte nějaké dotazy nebo požadavky? Pomocí tohoto formuláře kontaktujte naše specialisty.

* Tato pole jsou povinná.

Related products

EC-5000 Series
EC-5000 Series

Exhaust Pressure Controller

EV 2.0 Series
EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV-140C
EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

IR-400
IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PV Series
PV Series

Piezo Actuator Valve

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

UR-Z700 Series
UR-Z700 Series

Digital Automatic Pressure Regulator

VC Series
VC Series

Direct Liquid Injection System

VG-200S
VG-200S

Capacitance Manometer

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

CVS-ONE
CVS-ONE

Constant Volume Sampler

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

EXFM-ONE
EXFM-ONE

Ultrasonic Exhaust Flow Meter

FQ Series
FQ Series

Fuel Flow Measurement Systems

FS-3000
FS-3000

Thermal Flow Splitter

HyFQ-2000 Series
HyFQ-2000 Series

Hydrogen Fuel Flow Meter

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PTFM-1000V2
PTFM-1000V2

Pitot Tube Exhaust Flow Meter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Exhaust Flow Meter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VC Series
VC Series

Direct Liquid Injection System

Corporate