Ultrapure Water

Ultra-pure water is a high-purity water that minimizes impurities and brings them closer to H2O as much as possible. It is used in a variety of applications, including cleaning processes for semiconductor devices and flat panel displays (FDPs), and steam generators for power generation turbines. This ultrapure water is then manufactured through many processes, including demineralization, ion exchange, and multiple membrane treatment. HORIBA offers a wide lineup of high-precision meters required for the production and purity control of ultra-pure water in a wide range of applications.


Pole/Wall Mount Type (On-site Installation) ≪H-1 Series≫

HE-200R
HE-200R

Field-installation type electric resistivity meter (resistivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

Panel Mount Type ≪48/96 Series≫

HE-480R
HE-480R

Panel-mount type resistivity meter (resistivity meter)

HE-960RW
HE-960RW

Panel-mount type 2-channel electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HD-960L
HD-960L

Dissolved Oxygen Monitor in Low Concentration

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

Silica Monitor

SLIA-300
SLIA-300

Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

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