Comprehensive Particle Detection for Semiconductor and FPD Manufacturing Processes
HORIBA's PD Series is focused toward providing the particle detection support required for next-generation semiconductor and FPD manufacturing processes. The PD Series' great versatility, based on its outstanding detection capabilities, makes it ideal for handling mask production as well as exposure and wafer manufacturing processes.
Complementing HORIBA's HAZE-resistant monitors, the PD line-up offers models specifically for leading-edge masking processes plus compact, low-cost models. In addition, the range has now been enhanced with the introduction of new particle removal systems.
Particle Detection
Achieves dramatic cost reductions in advanced mask inspections
Low running costs thanks to a compact design, plus remarkable versatility
For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.
