High Grade Mirrors for VUV and XUV Applications

High Grade Mirrors

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The technical specifications placed on synchrotron radiation diffraction gratings such as excellent shape control, ultra low roughness, etc. are similar to the one placed on the mirrors that are installed on a synchotron beamline.

In order to control the diffraction-grating substrate quality HORIBA Jobin Yvon developed a dedicated polishing facility.

These polishing capabilities are used internally to supply state-of-the-art grating substrates to our recording grating laboratory and also high-quality VUV Soft X-ray mirrors for your applications.

HORIBA Jobin Yvon places considerable emphasis on the testing of components at every stage of the manufacturing process. Thus HORIBA Jobin Yvon can analyze errors and apply appropriate corrective action to the subsequent manufacturing stages. Slope Error is measured using interferometry and is cross-calibrated using long trace profilometry (LTP). Microroughness is measured using a Nomarski microscope during the preliminary polishing. The final quantitative microroughness measurements are made using a MicroMap interferential microscope to ensure compliance with specifications.

In addition to the below presented standard toroidal and cylindrical mirrors, HORIBA Jobin Yvon can manufacture custom plane, spherical, cylindrical and toroidal mirrors. Please contact your HORIBA Jobin Yvon representative for radius availability, manufacturability, price and delivery.

HORIBA Jobin Yvon capabilities include:

  • Material: Silicon, SiC CVD, Fused Silica, Zerodur
  • Shape: Plane, Spherical, Cylindrical, Toroidal
  • Surface shape: down to 0.5 µrad (0.1 arcsec)
  • Roughness: down to 0.2 nm
  • XUV reflective coating: Pt, Au, C, Ni